Confocal 3D inspection system and process

Details Confocal 3D inspection system and process Confocal 3D inspection system and process

2005-03-22

2005-03-22

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237400, C438S014000, C359S368000, C250S559400

Reexamination Certificate

active

06870609

ABSTRACT:
A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.

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