Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1995-11-27
1997-04-01
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250306, H01J 314
Patent
active
056169167
ABSTRACT:
Substantially collimated displacement detection light is led to a first lens and condensed by the first lens to proximities to a reflecting surface of a probe. The reflected light is displaced by an atomic force acting against a surface of a sample, where the reflected light varies in reflection angle according to the displacement. The displaced light is lead to the first lens, changed in direction by a mirror, and detected by magnifying the displacement of the probe. The detection further includes steps of moving a Z direction scan block in a direction vertical to the sample surface by a Z direction driving device, the Z direction scan block having the first lens and the probe, moving an X direction scan block in a first axial direction within a plane parallel to the sample surface by an X direction driving device, the X direction scan block having the Z direction scan block, the Z direction driving device, and the mirror, and moving a Y direction scan block by a Y direction driving device in a second axial direction perpendicular to the first axial direction within a plane parallel to the sample surface, the Y direction scan block having the X direction scan block, the X direction driving device, the detection light radiation system, and the displacement detection system.
REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 5135715 (1992-10-01), Ueyema et al.
patent: 5294804 (1994-03-01), Kajimura
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5408094 (1995-04-01), Kajimura
Doi Masateru
Handa Koji
Kubo Keishi
Yoshizumi Keiichi
Matsushita Electric - Industrial Co., Ltd.
Pyo Kevin
Westin Edward P.
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