Configuration measuring apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356358, G01B 902

Patent

active

051441500

ABSTRACT:
A configuration measuring apparatus includes a contacting member for contacting and tracing a surface of an object to be measured, a supporting member for supporting the contacting member and having a reflecting surface, an optical probe, a driving device, and an X-coordinate or XY-coordinate measuring device. The optical probe supports the contacting member through the supporting member and has an automatic focusing device for moving an objective lens in the Z-direction, which is an optical direction of the lens, so that a focusing point of the objective lens is positioned at the reflecting surface in spite of a possible dislocation of the reflecting surface, which is to be at a focusing position of the objective lens for condensing a laser beam and a device for measuring a Z-coordinate of the reflecting surface by allowing interference of the laser beam which has been reflected by the reflecting surface with a reference light. The driving device moves the optical probe in the X-direction or the XY-direction. The X-coordinate or XY-coordinate measuring device measures a position of the optical probe in the X-direction or the XY-direction. Then, the configuration of the surface of the object in XZ-coordinate or XYZ-coordinate is measured by the optical probe in cooperation with the contact member which traces the surface of the object.

REFERENCES:
patent: 4611916 (1986-09-01), Yoshizumi
patent: 4717255 (1988-01-01), Ulbers
patent: 4724318 (1988-02-01), Binnig
patent: 4776699 (1988-10-01), Yoshizumi
patent: 4818110 (1989-04-01), Davidson
patent: 4880975 (1989-11-01), Nishoka et al.
patent: 4916324 (1990-04-01), Meier
patent: 5017010 (1991-05-01), Mamin et al.
"Ultrahigh Accuracy 3-D Profilometer"--Applied Optics, vol. 26, No. 9, issued May 1, 1987--by Keiichi Yoshizumi et al.

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