Configuration for the automatic inscription or reinscription of

Details Configuration for the automatic inscription or reinscription of Configuration for the automatic inscription or reinscription of

1998-08-03

2000-11-14

Ryan, Patrick

Electric heating

Metal heating

By arc

21912167, 21912169, B23K 2600

Patent

active

061473219

ABSTRACT:
A configuration for the automatic inscription or reinscription of wafers provides the wafers with a marking for identification and for process management during the production of semiconductor components. The wafer must be moved between different stations for the automatic inscription of a wafer in an appropriate device. Considerable transport movements are saved by the integration of a read station in an inscription chamber having a positioning unit for the wafer.

REFERENCES:
patent: 5175774 (1992-12-01), Truax et al.
patent: 5265170 (1993-11-01), Hine et al.
patent: 5329090 (1994-07-01), Woelki et al.
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5567927 (1996-10-01), Kahn et al.
patent: 5877064 (1999-03-01), Chang et al.
patent: 5877899 (1999-03-01), Stern et al.
patent: 5942763 (1999-08-01), Mukogawa

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