Configurable probe card for automatic test equipment

Details Configurable probe card for automatic test equipment Configurable probe card for automatic test equipment

1995-09-11

1998-04-07

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324754, G01R 3102

Patent

active

057368503

ABSTRACT:
A configurable probe card for use with a tester for semiconductor devices. The probe is configurable so that the contact pattern during each touch down can be different. In this way, the number of devices being tested simultaneously can be maximized. The configurable probe card increases the utilization of the tester, thereby allowing increased throughput in the semiconductor manufacturing process or, alternatively, decreasing the overall cost of testing each device.

REFERENCES:
patent: 3493858 (1970-02-01), Baron et al.
patent: 4500836 (1985-02-01), Staudacher
patent: 4517512 (1985-05-01), Petrich et al.
patent: 5055780 (1991-10-01), Takagi et al.
patent: 5070297 (1991-12-01), Kwon et al.
patent: 5506510 (1996-04-01), Blumenau

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