Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-10-18
2010-11-30
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07843548
ABSTRACT:
A conduit system for a lithographic apparatus is disclosed, the conduit system including a conduit configured to guide a liquid or liquid-gas mixture, and a gas injection nozzle configured to introduce a gas in the liquid or liquid-gas mixture to at least partially absorb pressure peaks or waves in the liquid or liquid-gas mixture. In an embodiment, the gas injection nozzle may be arranged in a pump of the conduit system. The pump further includes a pump inlet, a pump outlet and a pump chamber between the pump inlet and the pump outlet arranged for compression of the liquid or liquid-gas mixture.
REFERENCES:
patent: 3171351 (1965-03-01), Shetler
patent: 3269318 (1966-08-01), Telford et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 4903793 (1990-02-01), Firey
patent: 5779439 (1998-07-01), Dufour
patent: 2001/0043314 (2001-11-01), Ota
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2006/0023184 (2006-02-01), Coon et al.
patent: 2006/0050257 (2006-03-01), Honda
patent: 2007/0128047 (2007-06-01), Gonnella et al.
patent: 2008/0188810 (2008-08-01), Larsen et al.
patent: 1 520 986 (2005-05-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 02/090771 (2002-11-01), None
Search Report and Written Opinion for Singapore Application/Patent No. 0717221-6 dated Feb. 6, 2009.
Chinese Office Action for Chinese Patent Application No. 200710168155.6 dated Aug. 7, 2009.
Franken Johannes Christiaan Leonardus
Van Den Heuvel Martinus Wilhelmus
Vugts Josephus Cornelis Johannes Antonlus
ASML Netherlands B.V.
Kim Peter B
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Conduit system for a lithographic apparatus, lithographic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Conduit system for a lithographic apparatus, lithographic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Conduit system for a lithographic apparatus, lithographic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4177455