Conduit for preventing oxidation of a electronic device

Details Conduit for preventing oxidation of a electronic device Conduit for preventing oxidation of a electronic device

2006-09-12

2006-09-12

Arbes, Carl J. (Department: 3729)

Metal working

Plural diverse manufacturing apparatus including means for...

Separate tool stations for selective or successive operation...

C029S03300H, C029S564100, C029S729000, C228S004500, C228S006200

Reexamination Certificate

active

07103959

ABSTRACT:
An apparatus to prevent oxidation of an electronic device, such as a semiconductor substrate during a semiconductor packaging process, comprises a substantially-enclosed conduit having at least one movable support defining a path through which the electronic device may travel and a plurality of gas outlets to introduce a relatively inert gas into the conduit. Conveying means adapted to engage and move the electronic device along the conduit is provided, and an opening along a portion of the conduit allows engagement between the conveying means and the electronic device. Actuating means are adapted to shift the movable support whereby the size of the path is adjustable to suit different electronic devices.

REFERENCES:
patent: 5609290 (1997-03-01), Bobbio et al.
patent: 5899737 (1999-05-01), Trabucco
patent: 6283358 (2001-09-01), Ball
patent: 6392286 (2002-05-01), Jin et al.
patent: 6808592 (2004-10-01), Rigali et al.

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