Conductor passage at a vacuum container

Details Conductor passage at a vacuum container Conductor passage at a vacuum container

1990-04-03

1991-12-17

Bueker,, Richard

Coating apparatus

Gas or vapor deposition

118723, 118725, C23C 1650

Patent

active

050726935

ABSTRACT:
When a specific electric potential is to be applied to a component (11) within a vacuum container, it is required to guide a conductor through a wall of the vacuum container (10). To this purpose, an insulating body (14) must be mounted in the wall (10). If physical or chemical processes within the container lead to separation of conductive material, there is the danger that the insulating body (14) will be coated within the container and that the resulting conductive coating forms a bridge between the conductor (13) and the container 10). For preventing deposit of material on the insulating body (14), a gas flow is generated for sweeping along the wall portions of the insulating body (14).

REFERENCES:
patent: 3755611 (1973-08-01), Queck et al.
patent: 4820370 (1989-04-01), Ellenberger

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