Conductor capacitance reduction in integrated circuits

Details Conductor capacitance reduction in integrated circuits Conductor capacitance reduction in integrated circuits

1993-03-26

1994-05-10

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437162, 437182, 437183, 437192, H01L 2144

Patent

active

053107004

ABSTRACT:
A passive semiconductor structure for reduction of the mutual capacitance between parallel conductors, with two parallel conductors separated from a substrate by a first dielectric layer and covered by a second dielectric layer. The second dielectric layer having a cavity formed between these conductors, whereby the effective relative dielectric constant of the medium between these conductors is reduced.

REFERENCES:
patent: 4502210 (1985-03-01), Okumura et al.
patent: 4735913 (1988-04-01), Hayes
patent: 4801560 (1989-01-01), Wood et al.
patent: 4859633 (1989-08-01), Bayraktaroglu
patent: 4986878 (1991-01-01), Malazgirt et al.
patent: 5192715 (1993-03-01), Sliwa, Jr. et al.
patent: 5217926 (1993-06-01), Langley

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