Conductivity modulation type semiconductor device and method for

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148DIG12, H01L 21225

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active

051282771

ABSTRACT:
A conductivity modulation type semiconductor device comprises a semiconductor anode substrate of a P type having two surfaces, a semiconductor substrate of an N type having two surfaces, the semiconductor substrate having a high impurity layer-like region on one surface thereof and a low concentration drain region on the other surface thereof, a body region of P type formed in the drain region and exposed at one surface of the semiconductor substrate, source regions of an N type formed in the body region and exposed at the other surface of the semiconductor substrate, and a gate layer formed within the isulating layer, which extends between the source and drain regions, on the body region. The other surface of the anode substrate is polished and is intimately joined to the polished surface of the semiconductor substrate to form a junction layer therebetween.

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