Conductivity modulated MOSFET

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Combined with field effect transistor

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257212, 257394, H01L 2910, H01L 2978

Patent

active

052869849

ABSTRACT:
A conductivity modulated MOSFET, having a semiconductor substrate of a first conductivity type, a semiconductor layer of a second conductivity type formed on the semiconductor substrate and having a high resistance, a base layer of the first conductivity type formed in the semiconductor layer, a source layer of the second conductivity type formed in the base layer, a gate electrode formed on a gate insulating film which is formed on a channel region, the channel region being formed in a surface of the base layer between the semiconductor layer and the source layer, a source electrode ohmic-contacting the source layer and the base layer, and a drain electrode formed on the surface of the semiconductor substrate opposite to the semiconductor layer, characterized in that the conductivity modulated MOSFET has a saturation current smaller than a latch-up current when a predetermined gate voltage is applied to the gate electrode.

REFERENCES:
patent: 4364073 (1982-12-01), Becke et al.
patent: 4672407 (1987-06-01), Nakagawa et al.
patent: 4782372 (1988-11-01), Nakagawa et al.
patent: 4881120 (1989-11-01), Nakagawa et al.
patent: 5086323 (1992-02-01), Nakagawa et al.
Chang, M. F., et al., "25 Amp, 500 Volt Insulated Gate Transistors," IEDM 83, 1983.

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