Conductivity modulated MOSFET

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357 2313, 357 42, 357 43, 357 59, H01L 2978

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active

049011243

ABSTRACT:
A conductivity modulated MOSFET is composed of a MOSFET formed according to SOI technique utilizing two polycrystalline silicon layers deposited on a semiconductor substrate through an oxide film, and a vertical bipolar transistor formed within the semiconductor substrate. Therefore, electrons and positive holes pass through different passages respectively, and any parasitic thyristor is not formed as in the conventional conductivity modulated MOSFET with a MOSFET built in the semiconductor substrate, and thus there is no possibility of causing the latch up phenomenon.

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patent: 4831424 (1989-05-01), Yoshida et al.
Nakagawa, "Safe Operating Area for 1200-V Nonlatchup Bipolar-Mode MOSFET's", Transactions on Electron Drvices, vol. ED-34, No. 2, Feb. 87.

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