Conductivity modulated field effect transistor with optimized an

Active solid-state devices (e.g. – transistors – solid-state diode – Conductivity modulation device

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257342, 257471, 257737, 257784, H01L 2358, H01L 2976, H01L 27095, H01L 2348

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active

052123960

ABSTRACT:
A COM switching device includes an n.sup.+ -type layer formed on a p.sup.+ -type layer, p.sup.+ -type regions formed in the surface areas of an n.sup.- -type layer formed on the n.sup.+ -type layer, n.sup.+ -type regions formed in the surface areas of the p.sup.+ -type regions, and a gate electrode formed on an insulating layer over the surface areas of the p.sup.+ -type regions which lie between the n.sup.+ -type regions and the n.sup.- -type layer. The n.sup.+ -type layer is formed such that the amount of impurities per unit area is between 5.times.10.sup.13 cm.sup.-2 and 1.times.10.sup.15 cm.sup.-2, and the p.sup.+ -type layer is formed to have an impurity concentration between 2.times.10.sup.18 and 8.times.10.sup.18 cm.sup.-3.

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"Newest Semiconductor Technology", 1971, Dec. 5, p. 250, FIG. 1.
Semiconductor devices physics and technology, Jan. 1985, Chapter 2, p. 38, by S. M. Sze.

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