Active solid-state devices (e.g. – transistors – solid-state diode – Conductivity modulation device
Patent
1991-12-17
1993-05-18
Hille, Rolf
Active solid-state devices (e.g., transistors, solid-state diode
Conductivity modulation device
257342, 257471, 257737, 257784, H01L 2358, H01L 2976, H01L 27095, H01L 2348
Patent
active
052123960
ABSTRACT:
A COM switching device includes an n.sup.+ -type layer formed on a p.sup.+ -type layer, p.sup.+ -type regions formed in the surface areas of an n.sup.- -type layer formed on the n.sup.+ -type layer, n.sup.+ -type regions formed in the surface areas of the p.sup.+ -type regions, and a gate electrode formed on an insulating layer over the surface areas of the p.sup.+ -type regions which lie between the n.sup.+ -type regions and the n.sup.- -type layer. The n.sup.+ -type layer is formed such that the amount of impurities per unit area is between 5.times.10.sup.13 cm.sup.-2 and 1.times.10.sup.15 cm.sup.-2, and the p.sup.+ -type layer is formed to have an impurity concentration between 2.times.10.sup.18 and 8.times.10.sup.18 cm.sup.-3.
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"Newest Semiconductor Technology", 1971, Dec. 5, p. 250, FIG. 1.
Semiconductor devices physics and technology, Jan. 1985, Chapter 2, p. 38, by S. M. Sze.
Nakagawa Akio
Ohashi Hiromichi
Hille Rolf
Kabushiki Kaisha Toshiba
Loke Steven
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