Conductivity improvement in thin films of refractory metal

Details Conductivity improvement in thin films of refractory metal Conductivity improvement in thin films of refractory metal

1998-10-13

2000-01-25

Sheehan, John

Metal treatment

Process of modifying or maintaining internal physical...

Processes of coating utilizing a reactive composition which...

148281, 148217, 148223, 148422, 428665, C23C 806

Patent

active

060174013

ABSTRACT:
A method of increasing conductivity of a refractory metal film disposed upon a substrate includes exposing the refractory metal film to an atmosphere comprising a silane of the form Si.sub.n H.sub.(2n+2), where n is a positive integer, while subjecting the refractory metal film to a temperature in excess of 700 degrees Celsius and to a base pressure not exceeding 10.sup.-8 torr for a time period which is chosen to be sufficiently long to increase the conductivity of the refractory metal film to a correspondingly sufficient degree.

REFERENCES:
patent: 4579752 (1986-04-01), Dubois et al.
patent: 4668530 (1987-05-01), Reif et al.

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