Conductive, plasma-resistant member

Details Conductive, plasma-resistant member Conductive, plasma-resistant member

2007-04-19

2010-02-02

Speer, Timothy M (Department: 1794)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S702000, C428S469000

Reexamination Certificate

active

07655328

ABSTRACT:
An electrically conductive, plasma-resistant member adapted for exposure to a halogen-based gas plasma atmosphere includes a substrate having formed on at least part of a region thereof to be exposed to the plasma a thermal spray coating composed of yttrium metal or yttrium metal in admixture with yttrium oxide and/or yttrium fluoride so as to confer electrical conductivity. Because the member is conductive and has an improved erosion resistance to halogen-based corrosive gases or plasmas thereof, particle contamination due to plasma etching when used in semiconductor manufacturing equipment or flat panel display manufacturing equipment can be suppressed.

REFERENCES:
patent: 3847650 (1974-11-01), Gregory et al.
patent: 6783863 (2004-08-01), Harada et al.
patent: 2005/0147852 (2005-07-01), Harada et al.
patent: 2005/0199183 (2005-09-01), Arai et al.
patent: 1 521 117 (1969-12-01), None
patent: 1 156 130 (2001-11-01), None
patent: 2001-164354 (2001-06-01), None
patent: 2002-241971 (2002-08-01), None

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