Conductive modulated MOSFET

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357 37, 357 38, H01L 2978

Patent

active

048811203

ABSTRACT:
A conductivity modulated MOSFET, having a semiconductor substrate of a first conductivity type, a semiconductor layer of a second conductivity type formed on the semiconductor substrate and having a high resistance, a base layer of the first conductivity type formed in the semiconductor layer, a source layer of the second conductivity type formed in the base layer, a gate electrode formed on a gate insulating film which is formed on a channel region, the channel region being formed in a surface of the base layer between the semiconductor layer and the source layer, a source electrode ohmic-contacting the source layer and the base layer, and a drain electrode formed on the surface of the semiconductor substrate opposite to the semiconductor layer, characterized in that the conductivity modulated MOSFET has a saturation current smaller than a latch-up current when a predetermined gate voltage is applied to the gate electrode.

REFERENCES:
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patent: 4589004 (1986-05-01), Yasuda et al.
patent: 4672407 (1987-06-01), Nakagawa et al.
patent: 4680604 (1987-07-01), Nakagawa et al.
patent: 4689647 (1987-08-01), Nakagawa et al.
"25 Amp, 500 Volt Insulated Gate Transistors," M. F. Chang et al., 1983 IEEE IEDM Tech. Digest, pp.83-86.
Goodman et al., "Improved COMFETs with Fast Switching Speed and High-Current Capability" pp. 79-82 1983 IEEE IEDM.

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