Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1996-08-28
1998-11-24
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257741, 257739, 257773, 438665, H01L 310236
Patent
active
058411798
ABSTRACT:
The application of a dissimilar anti-reflective coating on a conductive layer during photolithographic processing is avoided, as by modifying a portion of the upper surface of the conductive layer to exhibit anti-reflective properties. In an embodiment of the present invention, impurity ions are implanted into a portion of the upper surface of an aluminum or an aluminum-alloy conductive layer to render the upper portion substantially amorphous and, hence, decrease its reflectivity to perform an anti-reflective function.
REFERENCES:
patent: 4268347 (1981-05-01), Stephens
patent: 4704367 (1987-11-01), Alvis et al.
patent: 4771010 (1988-09-01), Epler et al.
patent: 4820611 (1989-04-01), Arnold, III et al.
patent: 4942451 (1990-07-01), Tamaki et al.
patent: 4997518 (1991-03-01), Madokoro
patent: 5076674 (1991-12-01), Lynam
patent: 5124780 (1992-06-01), Sandhu et al.
patent: 5139974 (1992-08-01), Sandhu et al.
patent: 5219788 (1993-06-01), Abernathey et al.
patent: 5486719 (1996-01-01), Sugiura et al.
patent: 5594280 (1997-01-01), Sekiguchi et al.
patent: 5600165 (1997-02-01), Tsukamoto et al.
patent: 5607776 (1997-03-01), Mueller et al.
patent: 5639687 (1997-06-01), Roman et al.
Ng Che-Hoo
Pramanick Shekhar
Singh Bhanwar
Advanced Micro Devices , Inc.
Hardy David B.
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