Coherent light generators – Particular active media – Semiconductor
Patent
1995-12-18
1998-02-17
Ullah, Akm E.
Coherent light generators
Particular active media
Semiconductor
372 90, 372 49, 257 13, 420 7, H01S 3102
Patent
active
057198918
ABSTRACT:
A conductive element with a lateral oxidation barrier is provided for the control of lateral oxidation processes in semiconductor devices such as lasers, vertical cavity surface emitting lasers and light emitting diodes. The oxidation barrier is formed through modification of one or more layers which initially were receptive to oxidation. The quality of material directly below the oxidation barrier may be preserved. Related applications include the formation of vertical cavity surface emitting lasers on non-GaAs substrates and on GaAs substrates.
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Kang Ellen E.
Picolight Incorporated
Ullah Akm E.
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