Conductive clearing frame for a semiconductor component

Details Conductive clearing frame for a semiconductor component Conductive clearing frame for a semiconductor component

1990-11-13

1993-11-09

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Physical configuration of semiconductor

With peripheral feature due to separation of smaller...

257797, H01L 2702

Patent

active

052605990

ABSTRACT:
A clearing frame for a semiconductor component is provided to enable a sufficient positioning of a particle beam. The clearing frame has a higher electrical conductivity than the environment thereof. The clearing frame also enables the determination of the layer resistance of the implantation via the high-frequency loss resistance measurement free from contact and destruction. The clearing frame can be placed at a fixed external DC potential, for example source or drain potential and therefore side gating effects can be avoided.

REFERENCES:
patent: 3772576 (1973-11-01), Nienhuis et al.
patent: 4109029 (1978-08-01), Ozedemir
patent: 4364078 (1982-12-01), Smith et al.
patent: 4377030 (1983-03-01), Pettenpaul et al.
patent: 4656055 (1987-04-01), Dwyer
patent: 4835592 (1989-05-01), Zommer
patent: 5031021 (1991-07-01), Baba et al.
patent: 5051807 (1991-09-01), Morozumi et al.
Matsumura et al., "Submicrometre Lift-Off Line with T-Shaped Cross-Sectional Form", Electronics Letters, vol. 17, No. 12, 1981, pp. 429-430.
Chao et al., "Electron-Beam Fabrication . . . Resist Technique", IEEE Trans. on Electron Devices, vol. ED-32, No. 6, 1985, pp. 1042-1046.
Morimoto et al., "A GaAs Metal Semiconductor . . . Ion Beams", J. Vac. Sci. Technol., vol. B5, No. 1, 1987, pp. 211-214.
Bandy et al., "Submicron GaAs . . . Source Resistances", IEEE Electron Device Letters, vol. EDL-4, No. 2, 1983, pp. 42-44.
"Voltage Contrast . . . Lithography", IBM Technical Disclosure Bulletin, vol. 28, No. 1, 1985, pp. 323-325.
Allison et al., "Microlithographic Techniques . . . Transistors", Solid State Technology, vol. 29, No. 6, 1986, pp. 169-175.

Affiliated with

Also associated with

Rating

Conductive clearing frame for a semiconductor component does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Conductive clearing frame for a semiconductor component, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Conductive clearing frame for a semiconductor component will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1145294