Conductive anti-reflection coating

Optical: systems and elements – Light interference – Produced by coating or lamina

Reexamination Certificate

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C359S585000, C359S587000

Reexamination Certificate

active

10901696

ABSTRACT:
A conductive anti-reflection coating has a surface quarterwave layer that is broken up into smaller portions by inserting one or more thin layers of conductive material in the dielectric material. The resulting stack of alternating layers of a dielectric material and an electrically conductive material provides a solid electrical contact to the buried conductive layer and exhibits a low surface contact resistance.

REFERENCES:
patent: 4422721 (1983-12-01), Hahn et al.
patent: 5362552 (1994-11-01), Austin
patent: 5667880 (1997-09-01), Okaniwa
patent: 6532112 (2003-03-01), Chu
patent: 6586101 (2003-07-01), Chu
patent: 6855369 (2005-02-01), Nakamura et al.

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