Conduction structure for infrared microbolometer sensors

Details Conduction structure for infrared microbolometer sensors Conduction structure for infrared microbolometer sensors

2006-10-19

2009-12-15

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07633065

ABSTRACT:
A conduction structure for infrared microbolometer sensors and a method for sensing electromagnetic radiation may be provided. The microbolometer may include a first conductor layer and a second conductor layer. The microbolometer further may include a bolometer layer between the first conductor layer and the second conductor layer.

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