Conducting electrode layers for ferroelectric capacitors in inte

Details Conducting electrode layers for ferroelectric capacitors in inte Conducting electrode layers for ferroelectric capacitors in inte

1991-06-13

1992-08-25

Griffin, Donald

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361321, 29 2542, H01G 406, H01G 410, H01G 700

Patent

active

051424371

ABSTRACT:
A ferroelectric capacitor for an integrated circuit includes a stack formed by a layer of a noble metal, a layer of a conducting oxide, a layer of a ferroelectric material, another layer of a conducting oxide and another layer of a noble metal. The capacitor can also have another layer of conducting oxide located over the top layer of noble metal and below the first layer of the noble metal. A method of forming the same through establishing one layer over the other and annealing each layer is also disclosed.

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