Conducting belt for use with anode holder and anode holder

Details Conducting belt for use with anode holder and anode holder Conducting belt for use with anode holder and anode holder

2011-03-01

2011-03-01

Bell, Bruce F (Department: 1759)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S286100, C204S297010, C204S278500, C204S198000, C204S22400M, C204S232000, C204S237000, C204S280000

Reexamination Certificate

active

07897024

ABSTRACT:
A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode.

REFERENCES:
patent: 6800812 (2004-10-01), Franks, Jr.
patent: 6830667 (2004-12-01), Yamamoto
patent: 7507319 (2009-03-01), Kuriyama et al.
patent: 2006/0113185 (2006-06-01), Kuriyama et al.
patent: 2007/0238265 (2007-10-01), Kurashina et al.
patent: 2005-029863 (2005-02-01), None

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