Conditioner for a polishing tool

Details Conditioner for a polishing tool Conditioner for a polishing tool

1996-05-31

1999-09-21

Morgan, Eileen P.

Abrading

Machine

Rotary tool

451 56, 451443, B24B 2900

Patent

active

059545704

ABSTRACT:
A conditioner assembly for a polishing machine includes a carrier, a conditioning element attached to the carrier, and an elastic element arranged between the conditioning element and the carrier. The conditioner assembly improves the polishing uniformity across the surface of a workpiece.

REFERENCES:
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patent: 4149343 (1979-04-01), Feldmeier
patent: 5010692 (1991-04-01), Ishida et al.
patent: 5035087 (1991-07-01), Nishiguchi et al.
patent: 5081051 (1992-01-01), Mattingly et al.
patent: 5216843 (1993-06-01), Breivogel et al.
patent: 5245796 (1993-09-01), Miller et al.
patent: 5456627 (1995-10-01), Jackson et al.
patent: 5486131 (1996-01-01), Cesna et al.
patent: 5516327 (1996-05-01), Kawasaki
patent: 5536202 (1996-07-01), Appel et al.
patent: 5538460 (1996-07-01), Onodera
patent: 5547417 (1996-08-01), Breivogel et al.

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