Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1996-09-30
1998-10-20
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
361280, G01P 15125
Patent
active
058249028
ABSTRACT:
A first embodiment of a condition responsive capacitive transducer, such as an accelerometer (1), is shown in which an electrically conductive sensor element (14) is sandwiched between upper (10) and lower (12) electrically insulative planar substrates and mounted in sealed, spaced apart relation by patterns (16) of adhesive containing spacing elements. A second embodiment (100) includes a signal conditioning capacitor having plate portions (114r, 120b and 114s, 120c) on either side of a condition responsive capacitor to minimize errors caused by translational movement of the sensor element (114) relative to the substrates (110, 112). Circuit conditioning electronics (124) is shown mounted directly on one of the substrates (110) and the sensor is mountable directly on a circuit board. A third embodiment (200) shows differential capacitors (224, 226, 228, 230, 232, 234) for minimizing errors due to misalignment of the movable element (114) with respect to the fixed supports (210, 212). Another embodiment provides a material system for use in condition responsive capacitive transducers having refractory metal for a sensing element and glass material for a supporting substrate.
REFERENCES:
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patent: 5239871 (1993-08-01), Reidemeister et al.
patent: 5345823 (1994-09-01), Reidemeister et al.
patent: 5499158 (1996-03-01), Bishop et al.
Corkum David L.
Kawate Keith W.
Park June
Baumann Russell E.
Chapman John E.
Donaldson Richard L.
Grossman Rene E.
Texas Instruments Incorporated
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