Condition responsive sensor

Details Condition responsive sensor Condition responsive sensor

1996-09-30

1998-08-11

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

361280, G01P 15125

Patent

active

057929548

ABSTRACT:
A condition responsive capacitive transducer, such as an accelerometer, is shown using a material system having refractory metal for the sensing element and glass material for a supporting substrate. The refractory metal is preferably tungsten, tantalum or molybdenum, and is coated with a glass seal enhancing material, such as titanium or nickel.

REFERENCES:
patent: 4653326 (1987-03-01), Danel et al.
patent: 4823230 (1989-04-01), Tiemann
patent: 4982351 (1991-01-01), Kawate et al.
patent: 5285097 (1994-02-01), Hirai
patent: 5345823 (1994-09-01), Reidemeister et al.

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