Condenser microphones based on silicon with humidity resistant s

Details Condenser microphones based on silicon with humidity resistant s Condenser microphones based on silicon with humidity resistant s

1992-04-13

1993-05-04

Steinberger, Brian S.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

381191, 361322, H04R 1900

Patent

active

052087891

ABSTRACT:
An condenser microphone element including a silicon core, a layer of silicon dioxide thereon, and a layer of tantalum pentoxide thereon.

REFERENCES:
patent: 3638085 (1972-01-01), Tierman
patent: 4464701 (1984-08-01), Roberts et al.
patent: 4471405 (1984-09-01), Howard et al.
patent: 4908805 (1990-03-01), Sprenkeis et al.

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