Condenser for illuminating a ringfield camera with synchrotron e

Details Condenser for illuminating a ringfield camera with synchrotron e Condenser for illuminating a ringfield camera with synchrotron e

1995-06-06

1996-04-30

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

378 34, G21K 106

Patent

active

055127592

ABSTRACT:
The present invention relates generally to the field of condensers for collecting light from a synchrotron radiation source and directing the light into a ringfield of a lithography camera. The present invention discloses a condenser comprising collecting, processing, and imaging optics. The collecting optics are comprised of concave and convex spherical mirrors that collect the light beams. The processing optics, which receive the light beams, are comprised of flat mirrors that converge and direct the light beams into a real entrance pupil of the camera in a symmetrical pattern. In the real entrance pupil are located flat mirrors, common to the beams emitted from the preceding mirrors, for generating substantially parallel light beams and for directing the beams toward the ringfield of a camera. Finally, the imaging optics are comprised of a spherical mirror, also common to the beams emitted from the preceding mirrors, images the real entrance pupil through the resistive mask and into the virtual entrance pupil of the camera. Thus, the condenser is comprised of a plurality of beams with four mirrors corresponding to a single beam plus two common mirrors.

REFERENCES:
patent: 3748015 (1973-07-01), Offner
patent: 5315629 (1994-05-01), Jewell et al.
patent: 5339346 (1994-08-01), White
patent: 5361292 (1994-11-01), Sweatt
patent: 5371774 (1994-12-01), Cerrina et al.
patent: 5439781 (1995-08-01), MacDowell et al.

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