Concept for compensating piezo-influences on an integrated...

Details Concept for compensating piezo-influences on an integrated... Concept for compensating piezo-influences on an integrated...

2007-11-27

2007-11-27

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Circuit tuning

C324S251000, C324S252000, C324S225000, C327S511000, C257S427000, C323S368000, C323S293000, C323S294000

Reexamination Certificate

active

11426201

ABSTRACT:
A compensation signal, which derives the mechanical stress, which acts on an integrated semiconductor circuit, from two partial compensation signals, which are generated by semiconductor elements with different stress characteristics, can be determined in more detail when the temperature dependence of a ratio of the partial compensation signals is also considered, wherein particularly a deviation of the ratio of the partial compensation signal to an ideal ratio is considered. Thereby, the rise in accuracy of the stress determination results from determining a deviation of the partial compensation signals, on which the stress determination is based, from a nominal behavior in a stress-free state, so that the deviation of the nominal behavior, which can be based, for example, on a variation of the process parameters in a production process of a semiconductor circuit, can also be considered, in addition to the known temperature behavior.

REFERENCES:
patent: 6906514 (2005-06-01), Ausserlechner
patent: 2005/0162160 (2005-07-01), Ausserlechner et al.
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patent: 1 496 344 (2004-07-01), None
patent: 03/040852 (2003-05-01), None

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