Concentric rod and tube sensor for thermal mass flow controller

Details Concentric rod and tube sensor for thermal mass flow controller Concentric rod and tube sensor for thermal mass flow controller

1983-02-16

1984-11-27

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

138 40, 138 44, G01F 168

Patent

active

044844727

ABSTRACT:
A concentric rod and tube sensor for a thermal mass flow controller or flow meter is disclosed. The flow meter has a flow passage therethrough for measuring the flow rate of a fluid and includes a heater for heating the fluid flowing therethrough. The flow meter senses the temperature rise of the fluid flowing through the flow path heated by the heater and then generates a signal in response to the temperature rise of the fluid with this signal being proportional to the mass flow rate of the fluid flowing through the flow path. The flow meter includes an inlet bushing having at least one opening therethrough, an outlet bushing having another opening therethrough, a tube extending between and being received by the bushings, and a rod disposed concentrically within the tube. The inlet and outlet bushings receive a respective end of the tube and the rod and positively hold the rod centered within the tube thereby to establish and to maintain a concentric annulus between the outer surface of the rod and the inner surface of the tube for the flow of fluid through the annulus.

REFERENCES:
patent: 1890985 (1932-12-01), Hamblen et al.
patent: 2406141 (1946-08-01), Fredericks
patent: 4207925 (1980-06-01), Nelson
patent: 4339949 (1982-07-01), Bahner et al.

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