Concentrator funnel for vacuum line particle monitors

Details Concentrator funnel for vacuum line particle monitors Concentrator funnel for vacuum line particle monitors

1992-01-23

1993-09-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356338, G01N 1506, G01N 2100

Patent

active

052471888

ABSTRACT:
A converging funnel is placed in an exhaust line to direct substantially all the gas flow in the exhaust line to the sensing laser beam of a particle sensor, thereby preventing deposition of species carried by the gas from depositing on the particle sensor. By concentrating substantially all gas flow through the laser beam, the particle count rate is increased because substantially all particles carried by the exhaust gas is channeled through the laser beam. Further, the particle sensor is also prevented from adverse heating effects of the exhaust gas. In one embodiment, the converging funnel is mounted to the interior wall of the exhaust line by a centering ring.

REFERENCES:
patent: 2812686 (1957-11-01), Sinclair
patent: 4547075 (1985-10-01), Fei
patent: 4874243 (1989-10-01), Perren
patent: 4979822 (1990-12-01), Sommer
patent: 5087823 (1992-02-01), Silvy et al.
patent: 5092675 (1992-03-01), Sommer
patent: 5125737 (1992-06-01), Rodriguez et al.

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