Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
Patent
1994-07-20
1995-08-08
Niebling, John
Chemistry: electrical and wave energy
Processes and products
Processes of treating materials by wave energy
20415312, 204409, 204406, 204434, 204412, 422 681, 422 81, 422 8201, 422 8202, G01N 2726
Patent
active
054395690
ABSTRACT:
A feedback control system for providing automated control of multi-component chemical concentrations in a hydrogen peroxide/ammonia (SC-1) aqueous bath or in a hydrogen peroxide/hydrochloric (SC-2) aqueous bath used for semiconductor processing. A sample from the liquid bath is routed to two sensors. Three separate schemes for determining concentrations of the two chemicals in the bath are provided by the selection of one of three separate pairs of sensors. A processor is used to monitor and control the chemical makeup of the bath.
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Bell Bruce F.
Kidd William W.
Niebling John
Sematech Inc.
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