Computerized multi-zone crystal growth furnace precise temperatu

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156601, 236 15R, 236 15BB, 236 15BF, 364477, G06F 1546

Patent

active

049071777

ABSTRACT:
A computerized method of digitally controlling the temperature profile of a heated article in which the temperature profile is defined by a plurality of temperature zones spaced about the article. The temperature profile of the article is monitored and a heating cycle requirement of the temperature zones of the profile is computed. A train of minute increments of power is supplied to heat each respective zone in accordance with the computed heating cycle requirements to achieve a precision approximately between .+-.0.1.degree. and .+-.0.5.degree. C. in a temperature range of approximately 400.degree. C. to 1,350.degree. C.

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patent: 4480312 (1984-10-01), Wingate
patent: 4501552 (1985-02-01), Wakamiya
patent: 4577278 (1986-03-01), Shannon
patent: 4688180 (1987-08-01), Motomiya

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