Computer-readable non-transitory medium storing...

Details Computer-readable non-transitory medium storing... Computer-readable non-transitory medium storing...

2011-06-07

2011-06-07

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Design of semiconductor mask or reticle

C716S051000, C716S052000

Reexamination Certificate

active

07958462

ABSTRACT:
A computer executable three-dimensional device simulation program product for the purpose of making a three-dimensional device simulation system which generates a three-dimensional model of a device by using a mask data performing the procedures of inputting cross-sectional feature information indicating a cross-sectional feature of an edge part of a mask, and calculating the three-dimensional model based on the mask data and input cross-sectional feature information, thereby enabling an easy generation of a complex three-dimensional feature by using pattern forming-use mask data when generating a three-dimensional feature model of a minute device.

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Japan Patent Office; Office Action mailed Jun. 1 2010, in connection with correspondent patent application No. JP 2006-043812. English-language translation provided.

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