Computer program for vacuum coating systems

Details Computer program for vacuum coating systems Computer program for vacuum coating systems

1988-04-27

1990-02-20

Nguyen, Nam X.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 364469, 36447409, C23C 1434, G06F 1546

Patent

active

049023985

ABSTRACT:
A computer program and method for controlling the coating of flexible materials in vacuum coating deposition systems.

REFERENCES:
patent: 4087568 (1978-05-01), Fay et al.
patent: 4172020 (1979-10-01), Tisone et al.
patent: 4767516 (1988-08-01), Nakatsuka et al.

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