Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2004-12-07
2010-06-01
Bali, Vikkram (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S144000, C382S145000, C382S147000, C382S148000, C438S015000, C716S030000, C716S030000
Reexamination Certificate
active
07729529
ABSTRACT:
Various computer-implemented methods are provided. One method for sorting defects in a design pattern of a reticle includes searching for defects of interest in inspection data using priority information associated with individual defects in combination with one or more characteristics of a region proximate the individual defects. The priority information corresponds to modulation levels associated with the individual defects. The inspection data is generated by comparing images of the reticle generated for different values of a lithographic variable. The images include at least one reference image and at least one modulated image. A composite reference image can be generated from two or more reference images. The method also includes assigning one or more identifiers to the defects of interest. The identifier(s) may include, for example, a defect classification and/or an indicator identifying if the defects of interest are to be used for further processing.
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International Search Report, PCT/US2005/044695 mailed May 22, 2006.
Gao Lisheng
Kowalski Michal
Kulkarni Ashok
Nafisi Kourosh
Peterson Ingrid B.
Bali Vikkram
Entezari Michelle
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
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