Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2011-04-12
2011-04-12
Rodriguez, Paul L (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C356S252000
Reexamination Certificate
active
07925486
ABSTRACT:
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout are provided. One computer-implemented method for creating a metrology target structure design for a reticle layout includes simulating how one or more initial metrology target structures will be formed on a wafer based on one or more fabrication processes that will be used to form a metrology target structure on the wafer and one or more initial metrology target structure designs. The method also includes creating the metrology target structure design based on results of the simulating step.
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Adel Mike
Hardister Robert
Kassel Elyakim
Pochkowski Mike
Smith Mark
KLA-Tencor Technologies Corp.
Louis Andre Pierre
Mewherter Ann Marie
Rodriguez Paul L
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