Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-04-04
2008-10-14
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07436505
ABSTRACT:
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.
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Belyaev Alexander
Haas Brian L.
Haller Kurt L.
Kavaldjiev Daniel
Kirk Mike D.
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Pham Hoa Q
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