Computer-implemented method and carrier medium configured to...

Details Computer-implemented method and carrier medium configured to... Computer-implemented method and carrier medium configured to...

2006-11-28

2006-11-28

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S030000, C700S031000, C700S049000, C700S110000, C703S006000

Reexamination Certificate

active

07142941

ABSTRACT:
A computer-implemented method and a storage medium adapted to identify potential causes of lithography process failure or drift is provided.

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International Search Report, PCT/US2004/014212, mailed May 4, 2005.
Howard et al., “Tuning and simulating a 193 nm resist for 2D applications,” Mar. 2002, 9 pages.

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