Comprehensive semiconductor test structure

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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29574, 324 64, 324 65R, 430 30, G01R 3126

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046723145

ABSTRACT:
A structure for measuring electrical and physical characteristics of a semiconductor region includes a semiconductor region having a first portion of width W.sub.1 and a second portion of width W.sub.2, wherein W.sub.1 is not equal to W.sub.2. First, second, third and fourth contact areas to the semiconductor region are disposed in seriatim such that the second portion of the semiconductor region extends between the third and fourth contact areas. A bonding pad is electrically connected to each of the contact areas for supplying current to predetermined pairs of the contact areas and for measuring the voltage across predetermined pairs of the contact areas.

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