Stock material or miscellaneous articles – Composite – Of quartz or glass
Reexamination Certificate
2011-03-01
2011-03-01
Brunsman, David M (Department: 1793)
Stock material or miscellaneous articles
Composite
Of quartz or glass
C428S427000, C428S428000, C428S432000, C428S446000, C428S697000, C428S701000, C428S702000, C106S286100, C106S286400, C106S286600, C106S286800, C106S287100, C106S287180, C106S287190
Reexamination Certificate
active
07897259
ABSTRACT:
Silicon compounds useful as coating reactants for the chemical vapor deposition of silicon oxide are disclosed, along with compounds useful as accelerants to increase the deposition rate of silicon oxide. The silicon-containing precursor comprises the structural formulawherein R1is an alkyl, alkenyl, alkynyl or aryl radical which may be substituted, and R2is a functional group which increases the reactivity of the silicon compound by withdrawing electron density away from the silicon atom, such as hydrogen, halogen, alkenyl, alkynyl, halogenated alkyl and perhalogenated alkyl radicals. The accelerant is a compound selected to take advantage of the partial positive charge on the silicon atom. Such accelerant compounds include Lewis acids and bases; water; ozone; trivalent compounds of nitrogen, boron and phosphorus; tetravalent compounds of sulfur and selenium; pentavalent compounds of phosphorus and a variety of metal compounds. Also disclosed are compositions including an additional metal-containing coating precursor, such as an organotin compound, to deposit another metal oxide along with silicon oxide.
REFERENCES:
patent: 5356718 (1994-10-01), Athey et al.
patent: 6124026 (2000-09-01), McCurdy et al.
Lococq David E.
Neuman George A.
Stewart-Davis Royann L.
Brunsman David M
PPG Industries Ohio Inc.
Siminerio Andrew C.
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