Compound vacuum pumps

Details Compound vacuum pumps Compound vacuum pumps

1995-10-05

1997-03-18

Larson, James

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F04D 1904

Patent

active

056116608

ABSTRACT:
A hybrid vacuum pump comprising a turbomolecular stage positioned at the inlet end of the pump and comprising a stator formed from an array of stationary blades and a rotor formed from a further array of blades arranged for rotation at high speed between the stator blades. A molecular drag stage is positioned at the outlet (high pressure) end of the pump and comprises at least two discs arranged for rotation within a stator with a minimal clearance between the circumferential edge of the discs and the stator. A flow passageway linking the turbomolecular stage with annular channels is defined between the stator and opposing faces of the discs and projections extending from the stator are provided for deflecting gas being pumped from the annular channels during rotation of the discs.

REFERENCES:
patent: 3628894 (1971-12-01), Ferguson et al.
patent: 4732529 (1988-03-01), Narita et al.
patent: 5074747 (1991-12-01), Ikegami et al.
patent: 5238362 (1993-08-01), Casaro et al.
patent: 5358373 (1994-10-01), Hablanian

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