Compound turbomolecular vacuum pump having two rotary shafts and

Details Compound turbomolecular vacuum pump having two rotary shafts and Compound turbomolecular vacuum pump having two rotary shafts and

1990-12-27

1992-06-02

Look, Edward K.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

4174234, 417203, 417205, F04D 1904, F04B 4106

Patent

active

051182513

ABSTRACT:
A pump enabling a molecular vacuum to be reached, the pump comprising a stator and rotor assembly comprising two rotors having parallel shafts rotating in opposite directions, the stator including a suction inlet and a delivery outlet, wherein the pump is split axially into a first zone situated at its suction end, followed by a second zone, said first zone being of the turbomolecular type having fins and two rotors, said second zone being of the type having two screws or two rotary pistons on parallel shafts, one of the shafts being driven by a motor and the other being driven by a transmission.

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