Compound sliding seal unit suitable for atmosphere to vacuum...

Seal for a joint or juncture – Seal between relatively movable parts

Reexamination Certificate

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Details

C277S913000, C277S911000, C355S076000, C451S289000, C250S492210, C250S440110, C250S433000

Reexamination Certificate

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07740247

ABSTRACT:
The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system. The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus. The compound unit also allows the user to maintain a high vacuum within the vacuum environment despite the fact that the height of the feed-through member can be raised and lowered repeatedly at will. Its compact size frees space which can be used to extend the vacuum chamber for purposes such as a deep Faraday cup for beam measurement.

REFERENCES:
patent: 6080046 (2000-06-01), Shendon et al.
patent: 6421112 (2002-07-01), Bisschops et al.
patent: 6618122 (2003-09-01), Bisschops et al.
patent: 6854708 (2005-02-01), Contin et al.

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