Compound semiconductor optical integrated circuit having isolati

Details Compound semiconductor optical integrated circuit having isolati Compound semiconductor optical integrated circuit having isolati

1975-08-25

1977-04-05

Corbin, John K.

350 96GN, G02B 514

Patent

active

040158934

ABSTRACT:
An isolation zone for light transmission is formed in a compound semiconductor optical integrated circuit by selective oxidation of a compound semiconductor surface by oxygen plasma.

REFERENCES:
patent: 3666548 (1972-05-01), Brack et al.
patent: 3922062 (1975-11-01), Uchida

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