Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate
2005-05-10
2005-05-10
Look, Edward K. (Department: 3745)
Rotary kinetic fluid motors or pumps
Smooth runner surface for working fluid frictional contact
C415S143000
Reexamination Certificate
active
06890146
ABSTRACT:
A friction vacuum pump (1) has at least one turbomolecular pump stage (6, 7) with a molecular pump stage (12, 13, 15) that is subsequently connected on the pressure side (3), and with a transition stage (23) mounted between the turbomolecular pump stage and the molecular pump stage. In order to improve the transition from the turbomolecular zone to the molecular zone, the transition stage has a flow section that is continuously tapered in the tangential by limiting surfaces (27, 28).
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Blumenthal Roland
Hundertmark Stephan
Fay Sharpe Fagan Minnich & McKee LLP
Leybold Vakuum GmbH
Look Edward K.
McAleenan James M.
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