Compound friction vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

Reexamination Certificate

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Details

C415S143000

Reexamination Certificate

active

06890146

ABSTRACT:
A friction vacuum pump (1) has at least one turbomolecular pump stage (6, 7) with a molecular pump stage (12, 13, 15) that is subsequently connected on the pressure side (3), and with a transition stage (23) mounted between the turbomolecular pump stage and the molecular pump stage. In order to improve the transition from the turbomolecular zone to the molecular zone, the transition stage has a flow section that is continuously tapered in the tangential by limiting surfaces (27, 28).

REFERENCES:
patent: 3969039 (1976-07-01), Shoulders
patent: 5052887 (1991-10-01), Novikov et al.
patent: 5358373 (1994-10-01), Hablanian
patent: 5553998 (1996-09-01), Muhlhoff et al.
patent: 5695316 (1997-12-01), Schutz et al.
patent: 6168374 (2001-01-01), Stolle et al.
patent: 6334754 (2002-01-01), Kabasawa
patent: 6422829 (2002-07-01), Schutz
patent: 19632874 (1998-02-01), None
patent: 442 556 (1991-08-01), None
patent: 692 636 (1996-01-01), None
patent: WO 99 15793 (1999-04-01), None

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