Compound, fluorine-containing polymerizable cyclic olefin...

Details Compound, fluorine-containing polymerizable cyclic olefin... Compound, fluorine-containing polymerizable cyclic olefin...

2006-03-14

2006-03-14

Witherspoon, Sikarl A. (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Oxygen containing

C568S343000, C568S347000, C568S817000, C568S823000, C526S242000, C526S244000, C430S270100

Reexamination Certificate

active

07012161

ABSTRACT:
There is disclosed a fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic olefin compound which is excellent in transparency to irradiation, for example, at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less and dry etching resistance, has low hydrophobicity, and is excellent in development characteristics, and thus is useful as a raw material for a base resin of photoresist composition

REFERENCES:
patent: 6124074 (2000-09-01), Varanasi et al.
patent: 6800418 (2004-10-01), Yoon et al.
patent: A 2001-328964 (2001-11-01), None
patent: A 2002-255875 (2002-09-01), None

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