Compositions – Barrier layer device compositions – Group iii element containing binary compound; e.g. – ga – as
Reexamination Certificate
2007-10-09
2007-10-09
Koslow, C. Melissa (Department: 1755)
Compositions
Barrier layer device compositions
Group iii element containing binary compound; e.g., ga, as
C556S412000, C556S465000
Reexamination Certificate
active
10776553
ABSTRACT:
In one aspect, the invention encompasses a semiconductor processing method wherein a conductive copper-containing material is formed over a semiconductive substrate and a second material is formed proximate the conductive material. A barrier layer is formed between the conductive material and the second material. The barrier layer comprises a compound having silicon chemically bonded to both nitrogen and an organic material. In another aspect, the invention encompasses a composition of matter comprising silicon chemically bonded to both nitrogen and an organic material. The nitrogen is not bonded to carbon. In yet another aspect, the invention encompasses a semiconductor processing method. A semiconductive substrate is provided and a layer is formed over the semiconductive substrate. The layer comprises a compound having silicon chemically bonded to both nitrogen and an organic material.
REFERENCES:
patent: 4158717 (1979-06-01), Nelson
patent: 4444617 (1984-04-01), Whitcomb
patent: 4474975 (1984-10-01), Clemons et al.
patent: 4523214 (1985-06-01), Hirose et al.
patent: 4552783 (1985-11-01), Stoll et al.
patent: 4562091 (1985-12-01), Sachdev et al.
patent: 4592129 (1986-06-01), Legge
patent: 4600671 (1986-07-01), Saitoh et al.
patent: 4648904 (1987-03-01), DePasquale et al.
patent: 4695859 (1987-09-01), Guha et al.
patent: 4702936 (1987-10-01), Maeda et al.
patent: 4755478 (1988-07-01), Abernathey et al.
patent: 4764247 (1988-08-01), Leveriza et al.
patent: 4805683 (1989-02-01), Magdo et al.
patent: 4833096 (1989-05-01), Huang et al.
patent: 4863755 (1989-09-01), Hess et al.
patent: 4870470 (1989-09-01), Bass et al.
patent: 4910160 (1990-03-01), Jennings et al.
patent: 4940509 (1990-07-01), Tso et al.
patent: 4954867 (1990-09-01), Hosaka
patent: 4971655 (1990-11-01), Stefano et al.
patent: 4992306 (1991-02-01), Hochberg et al.
patent: 5034348 (1991-07-01), Hartswick et al.
patent: 5036383 (1991-07-01), Mori
patent: 5061509 (1991-10-01), Naito et al.
patent: 5140390 (1992-08-01), Li et al.
patent: 5219613 (1993-06-01), Fabry et al.
patent: 5234869 (1993-08-01), Mikata et al.
patent: 5244537 (1993-09-01), Ohnstein
patent: 5260600 (1993-11-01), Harada
patent: 5270267 (1993-12-01), Ouellet
patent: 5276347 (1994-01-01), Wei et al.
patent: 5285017 (1994-02-01), Gardner
patent: 5286661 (1994-02-01), de Fresart et al.
patent: 5302366 (1994-04-01), Schuette et al.
patent: 5312768 (1994-05-01), Gonzalez
patent: 5314724 (1994-05-01), Tsukune et al.
patent: 5340621 (1994-08-01), Matsumoto et al.
patent: 5356515 (1994-10-01), Tahara et al.
patent: 5376591 (1994-12-01), Maeda et al.
patent: 5405489 (1995-04-01), Kim et al.
patent: 5413963 (1995-05-01), Yen et al.
patent: 5429987 (1995-07-01), Allen
patent: 5439838 (1995-08-01), Yang
patent: 5441797 (1995-08-01), Hogan et al.
patent: 5461003 (1995-10-01), Havemann et al.
patent: 5470772 (1995-11-01), Woo
patent: 5472827 (1995-12-01), Ogawa et al.
patent: 5472829 (1995-12-01), Ogawa
patent: 5482894 (1996-01-01), Havemann
patent: 5498555 (1996-03-01), Lin
patent: 5536857 (1996-07-01), Narula et al.
patent: 5541445 (1996-07-01), Quellet
patent: 5543654 (1996-08-01), Dennen
patent: 5554567 (1996-09-01), Wang
patent: 5591494 (1997-01-01), Sato et al.
patent: 5591566 (1997-01-01), Ogawa
patent: 5593741 (1997-01-01), Ikeda
patent: 5600165 (1997-02-01), Tsukamoto et al.
patent: 5639687 (1997-06-01), Roman et al.
patent: 5641607 (1997-06-01), Ogawa et al.
patent: 5648202 (1997-07-01), Ogawa et al.
patent: 5652187 (1997-07-01), Kim et al.
patent: 5656330 (1997-08-01), Niiyama et al.
patent: 5656337 (1997-08-01), Park et al.
patent: 5661093 (1997-08-01), Ravi et al.
patent: 5667015 (1997-09-01), Harestad et al.
patent: 5670297 (1997-09-01), Ogawa et al.
patent: 5674356 (1997-10-01), Nagayama
patent: 5677015 (1997-10-01), Hasegawa
patent: 5677111 (1997-10-01), Ogawa
patent: 5691212 (1997-11-01), Tsai et al.
patent: 5698352 (1997-12-01), Ogawa et al.
patent: 5709741 (1998-01-01), Akamatsu et al.
patent: 5710067 (1998-01-01), Foote et al.
patent: 5711987 (1998-01-01), Bearinger et al.
patent: 5731242 (1998-03-01), Parat et al.
patent: 5741721 (1998-04-01), Stevens
patent: 5744399 (1998-04-01), Rostoker
patent: 5747388 (1998-05-01), Küsters et al.
patent: 5750442 (1998-05-01), Juengling
patent: 5753320 (1998-05-01), Mikoshiba et al.
patent: 5759746 (1998-06-01), Azuma et al.
patent: 5759755 (1998-06-01), Park et al.
patent: 5783493 (1998-07-01), Yeh et al.
patent: 5786039 (1998-07-01), Brouquet
patent: 5789819 (1998-08-01), Gnade et al.
patent: 5792689 (1998-08-01), Yang et al.
patent: 5796151 (1998-08-01), Hsu et al.
patent: 5800877 (1998-09-01), Maeda et al.
patent: 5801399 (1998-09-01), Hattori et al.
patent: 5807660 (1998-09-01), Lin et al.
patent: 5817549 (1998-10-01), Yamazaki et al.
patent: 5831321 (1998-11-01), Nagayama
patent: 5838052 (1998-11-01), McTeer
patent: 5840610 (1998-11-01), Gilmer et al.
patent: 5858880 (1999-01-01), Dobson et al.
patent: 5872035 (1999-02-01), Kim et al.
patent: 5872385 (1999-02-01), Taft et al.
patent: 5874367 (1999-02-01), Dobson
patent: 5883011 (1999-03-01), Lin et al.
patent: 5883014 (1999-03-01), Chen
patent: 5933721 (1999-08-01), Hause et al.
patent: 5948482 (1999-09-01), Brinker et al.
patent: 5960289 (1999-09-01), Tsui et al.
patent: 5962581 (1999-10-01), Hayase et al.
patent: 5968324 (1999-10-01), Cheung et al.
patent: 5968611 (1999-10-01), Kaloyeros et al.
patent: 5981368 (1999-11-01), Gardner et al.
patent: 5985519 (1999-11-01), Kakamu et al.
patent: 5986318 (1999-11-01), Kim et al.
patent: 5991217 (1999-11-01), Tavrow et al.
patent: 5994217 (1999-11-01), Ng
patent: 5994730 (1999-11-01), Shrivastava et al.
patent: 6001741 (1999-12-01), Alers
patent: 6001747 (1999-12-01), Annapragada
patent: 6004850 (1999-12-01), Lucas et al.
patent: 6008121 (1999-12-01), Yang et al.
patent: 6008124 (1999-12-01), Sekiguchi et al.
patent: 6017614 (2000-01-01), Tsai et al.
patent: 6020243 (2000-02-01), Wallace et al.
patent: 6022404 (2000-02-01), Ettlinger et al.
patent: 6028015 (2000-02-01), Wang et al.
patent: 6030901 (2000-02-01), Hopper
patent: 6037228 (2000-03-01), Hsu
patent: 6040619 (2000-03-01), Wang et al.
patent: 6054379 (2000-04-01), Yau et al.
patent: 6057217 (2000-05-01), Uwasawa
patent: 6060765 (2000-05-01), Maeda
patent: 6060766 (2000-05-01), Mehta et al.
patent: 6071799 (2000-06-01), Park et al.
patent: 6072227 (2000-06-01), Yau et al.
patent: 6080529 (2000-06-01), Ye et al.
patent: 6083852 (2000-07-01), Cheung et al.
patent: 6087064 (2000-07-01), Lin et al.
patent: 6087267 (2000-07-01), Dockrey et al.
patent: 6096656 (2000-08-01), Matzke et al.
patent: 6114255 (2000-09-01), Juengling
patent: 6114736 (2000-09-01), Balasubramanyam et al.
patent: 6118163 (2000-09-01), Gardner et al.
patent: 6121133 (2000-09-01), Iyer et al.
patent: 6124641 (2000-09-01), Matsuura
patent: 6130168 (2000-10-01), Chu et al.
patent: 6133096 (2000-10-01), Su et al.
patent: 6133613 (2000-10-01), Yao et al.
patent: 6133618 (2000-10-01), Steiner
patent: 6136636 (2000-10-01), Wu
patent: 6140151 (2000-10-01), Akram
patent: 6140677 (2000-10-01), Gardner et al.
patent: 6143670 (2000-11-01), Cheng et al.
patent: 6153504 (2000-11-01), Shields et al.
patent: 6156485 (2000-12-01), Tang et al.
patent: 6156674 (2000-12-01), Li et al.
patent: 6159804 (2000-12-01), Gardner et al.
patent: 6159871 (2000-12-01), Loboda et al.
patent: 6184151 (2001-02-01), Adair et al.
patent: 6184158 (2001-02-01), Shufflebotham et al.
patent: 6187657 (2001-02-01), Xiang et al.
patent: 6187694 (2001-02-01), Cheng et al.
patent: 6198144 (2001-03-01), Pan et al.
patent: 6200835 (2001-03-01), Manning
patent: 6200863 (2001-03-01), Xiang et al.
patent: 6204168 (2001-03-01), Naik et al.
patent: 6208004 (2001-03-01), Cunningham
patent: 6209484 (2001-04-01), Huang et al.
patent: 6218292 (2001-04-01), Foote
patent: 6225217 (2001-05-01), Usami et al.
patent: 6235568 (2001-05-01), Murthy et al.
patent: 6235591 (2001-05-01), Balasubramanian et al.
patent: 6238976 (2001-05-01), Noble et al.
patent: 6268282 (2001-07-01), Sandhu et al.
patent: 6274292 (2001-08-01), Holscher et al.
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Li Weimin
Yin Zhiping
Koslow C. Melissa
Micro)n Technology, Inc.
Wells St. John P.S.
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