Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2010-02-01
2010-12-14
Boyer, Charles I (Department: 1796)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S175000, C510S178000, C510S254000, C510S259000, C510S261000, C510S264000, C134S001200, C134S001300
Reexamination Certificate
active
07851427
ABSTRACT:
Resist stripping agents, useful for fabricating circuits and/or forming electrodes on semiconductor devices for semiconductor integrated circuits with reduced metal etch rates, particularly copper etch rates, are provided with methods for their use. The preferred stripping agents contain low concentrations of a copper salt with or without an added amine to improve solubility of the salt. Further provided are integrated circuit devices and electronic interconnect structures prepared according to these methods.
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Phenis Michael T.
Pollard Kimberly Dona
Boyer Charles I
Dynaloy, LLC
Woodard Emhardt Moriarty McNett & Henry LLP
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