Compositions for polishing silicon and germanium

Details Compositions for polishing silicon and germanium Compositions for polishing silicon and germanium

1978-01-16

1981-04-07

Arnold, Donald J.

Abrasive tool making process, material, or composition

With synthetic resin

51281R, 51302, 51308, 106 3, 106 5, C09K 314

Patent

active

042603960

ABSTRACT:
A composition for polishing silicon and germanium comprises a synthetic amorphous silica polishing agent and a suspending agent selected from the group consisting of water-soluble carboxypolymethylene gums and xanthum gums. The composition may be used for polishing in the form of an aqueous alkaline slurry.

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patent: 3275460 (1966-09-01), Jeanneret
patent: 3428464 (1969-02-01), Pollard
patent: 3455705 (1969-07-01), Rusher
patent: 3462251 (1969-08-01), Whalen
patent: 3619962 (1971-11-01), Combe
patent: 3817727 (1974-06-01), Yancey
patent: 3821008 (1974-06-01), Jordan et al.
patent: 3966432 (1976-06-01), Rayner
patent: 4038048 (1977-07-01), Thrower
patent: 4057939 (1977-11-01), Basi

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